All other microscopic images were obtained using a Leica DM 6000 fluorescence microscope in combination with IPLab imaging software (Scanalytics Inc., Fairfax, VA, USA).
The surface morphology of the coated substrates was examined by field emission scanning electron microscope in combination with focused ion beam and 3D stylus profilometer.
A scanning electron microscope in combination with an electron backscatter diffraction pattern mapping technique was employed to reveal microstructures and microtextures formed on these two facilities.
In this work, damage morphologies were observed using a Nomarski microscope in combination with AFM. Figure 4 shows the damage morphologies for the HfO2/Al2O3 anti-reflector film deposited with either inorganic or organic precursors.
Based on a newly designed set-up on top of an inverted light microscope in combination with a speed optimized low noise intracellular amplifier, a novel mode for control of the distance between the probe and surface has been developed.
Images were acquired with a ×20 objective using a Zeiss AxioCam MRc5 microscope in combination with AxioVision 4.8 software.
Optical microscope images have been acquired by a Nikon Labophot 2A microscope in combination with a Nikon type 115 digital camera.
Labelled specimens were examined using an Olympus BX41 fluorescence microscope in combination with a ProgRes Speed XT5 camera with the exception of Fig. S1C and D, which were taken by a Leica DM5500 B fluorescence microscope.
