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This high resolution comes at the cost of higher defect rates from particles and trapped air bubbles on a nonconforming mold and substrate.
As shown in a previous report [21], an isotropic pressure was applied through a flexible membrane to assure uniform pressing between the PET film mold and substrate.
The two-step imprinting can be used to selectively etch Al at established primary structure because the etchant only acts at the contact site between the mold and substrate [18].
The Si mold Ni substrate combination shows successful pattern transfer to the resist polymer even without an anti-sticking layer as a result of the desirable balance of surface free energy for mold and substrate materials.
To correlate the deformed shape and delamination of PMMA resist from the substrate in indentation and release processes, non-bond interaction energy between a rigid mold and resist was calculated for each combination of mold and substrate materials.
Similar(55)
Package variables included die size, package size, ball count, pitch, mold compound, and substrate material.
In accordance with a real NIL process, a sequence of indentation relaxation release processes was quasi-statically simulated using isothermal ensemble simulation on tri-layer molecular structures consisting of a mold, resist, and substrate.
Although it is difficult to identify the main hyphae, there is great branch thereof, which assume a morphology of hyphae elongated involving large part of the substrate surface, thereby increasing the interaction between the mold and the substrate.
The liquid bridge allowed good conformal contact between the semiconductors contained in the mold and the substrate.
After the ethanol layer between the mold and the substrate dried at 70 °C for 10 min, the mold was peeled away, leaving the Ag nanowires on the substrates.
Due to the flexibility of the PET mold, conformal contact can be achieved between the PET mold and curved substrate, and a uniform pressing force can be delivered.
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Justyna Jupowicz-Kozak
CEO of Professional Science Editing for Scientists @ prosciediting.com