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Base pressure (bar).
The base pressure was <3 × 10−4 Pa.
The base pressure was less than 8 × 10−5 Pa.
The base pressure was lower than 2 × 10−6 Torr.
The base pressure was 1 × 10−6 Torr.
The base pressure of the furnace was 1 mTorr.
The base pressure was kept below 10-6 Torr.
The base pressure is kept approximately 1 × 10−6 mbar.
The base pressure of the field emission testing system was <1 × 10−8 Torr.
Before deposition, the chamber was pumped down to a base pressure of 5.0 × 10-5 Torr.
During the irradiation, the base pressure of chamber was maintained at approximately 10−7 mbar.
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