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The average open-circuit voltages for the different rear side passivation layers lie in a very close range of 648.4 mV for the wet oxide grown from purified steam to 650.6 mV for the dry oxidation.
(a) A sandwich stack of nitride/TEOS oxide/nitride layers was sequentially deposited and then patterned on a Si substrate capped with a 200-nm-thick wet oxide.
The rear side of laboratory type laser-fired contact (LFC) solar cells has been passivated by a wet oxide grown from purified steam at a temperature of 850 °C.
As a reference also a standard wet oxide grown at the same temperature as well as a dry oxide grown at 1,050 °C has been applied for the passivated emitter rear cell (PERC) type solar cells.
First, a sandwich stack of nitride/tetraethyl orthosilicate (TEOS) oxide/nitride layers was sequentially deposited and then patterned on a Si substrate capped with a 200-nm-thick wet oxide.
Indeed, the AFM morphology map in Figure 1b, obtained on the UV-irradiated 3C-SiC surface after selective wet oxide etching, reveals trenches of a few nanometers at the SF locations.
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Thus, the wet oxides grown from purified steam seem to be well suited for the rear side passivation of PERC-type solar cells.
Wet oxides grown from purified steam have been demonstrated to provide a high level of surface passivation that at least is comparable to wet oxides grown by the standard process, where the water vapor is introduced by the pyrolytic generation from high-purity gases (H2, O2) [53].
Creating a blanket layer of oxide (e.g., by wet oxidation) over the waveguide and subsequently etching it has also been proven to lower surface roughness [ 40].
A comparison is made of the behavior of silicon on insulator buried oxides and wet thermal oxides before and after fluorine implantation and irradiation.
An oxide layer with a thickness of approximately 1 μm was then deposited by wet oxidation process.
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