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Leaf and right circular flexure hinges are utilized in the nano-manipulator.
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Figure 4(a) examines the lateral deformations of the lever in the nano-manipulator when a lateral force is applied at the free end.
(19) Open image in new window Figure 5 Dynamics modeling of the nano-manipulator in linear motions: (a) deformations and (b) lumped mass model.
The dynamics of the nano-manipulator in linear and angular motions is analyzed.
The frequency responses of the nano-manipulator are presented in Figure 10.
The measured and estimated output stiffness of the nano-manipulator are listed in Table 2.
The nano-manipulator is symmetric in the x- and y-axes, thus attenuating thermally induced errors and guaranteeing uniform characteristics.
In addition, we measured the tensile strength and elastic modulus of the CNT and CNF in the scanning electron microscope (SEM) installed the nano-manipulator and the force sensor and this measurement system and results would be introduced in detail.
The schematic diagram and the geometric parameters of the nano-manipulator are presented in Figure 1, where a central platform is connected to four rigid linkages (consecutively labeled as linkage 1‒4) and then to the fixed frame through leaf springs.
Open image in new window Figure 1 Schematic diagram of the nano-manipulator.
Open image in new window Figure 8 Angular motion of the nano-manipulator: (a) overall deformation, (b1) and (b2) equivalent transformations of Structure II, and (c) transformation of Structure IV.
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