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Chemical analyses utilized a quadrupole mass spectrometer (QMS) to perform pyrolysis-evolved gas analysis (EGA) and gas chromatography mass spectrometry (GC/MS) both with and without derivatization, as well as laser desorption mass spectrometry (LD/MS) techniques.
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A quadrupole mass spectrometer and a total ion-current measuring device have been utilized to monitor the ion compositions of the gas mixtures of CH4/H2, CH4/Ar, CH4/H2/O2 and CH4/H2/N2 during the deposition process for quality control and process optimization.
The ions formed are detected in a quadrupole mass spectrometer.
The analysis of the breakthrough gas was performed using a quadrupole mass spectrometer.
Ion mass (as measured by a quadrupole mass spectrometer) is not a unique indicator of chemical composition.
The Ge-flux is controlled by a quadrupole mass spectrometer with closed loop feedback.
Real-time measurements of CO conversion are done using a quadrupole mass spectrometer.
The concentration of trichlorosilane exhausted from the reactor was measured by a quadrupole mass spectra analyzer.
Electroionization (EI-70 eV) and a quadrupole mass analyzer operated in scans from 50 to 700 amu.
Anions formed were extracted by a weak electric field into a quadrupole mass spectrometer.
These species were monitored at the downstream detection point by a quadrupole mass spectrometer.
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