Sentence examples for using the polysilicon layer from inspiring English sources

Exact(1)

This contribution reports the design, fabrication and characterization of a bulk acoustic mode resonator at VHF band using the polysilicon layer of a standard CMOS technology (AMS 0.35 μm).

Similar(59)

We have fabricated polycrystalline silicon cantilevers by using the two polysilicon layers of a commercial CMOS process with minimum design rule widths.

Polysilicon spacers were produced by time-controlled etching of the polysilicon layer with HBr and CF4 plasma in a reactive ion-etching system (Figure 1d).

For the polysilicon layer, layout determination is complicated by processing artefacts and by low discrimination between materials in backscattered-electron images.

As a first step towards the realization of a complete system integrating the cantilevers and a CMOS circuit, we have fabricated polycrystalline silicon cantilevers by using two polysilicon layers with thicknesses identical to those in a CMOS process.

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Using modeling and experimental results, the piezoresistive coefficient of the top polysilicon layer in MUMPs process was calculated to be −10.65×10−11 Pa−10.65×10−11

The upper polysilicon layer has been used as a piezoresistor.

The upper polysilicon layer has been doped and used as piezoresistor.

The measurements were made on the sidewall surfaces on the tribogauge at the third structural polysilicon layer in the device.

It looks like a traditional temperature sensitive Wheatstone bridge (fabricated using polysilicon resistors layers of positive and negative temperature coefficients), followed by a low-noise low-offset, low supply voltage differential amplifier, which improves the circuit sensitivity to about 20 mV/K.

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