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The resulting resist surfaces were scanned using a physical profilometer (KLA-Tencor Alpha-Step IQ, Milpitas, CA, USA) having a depth resolution of 10 nm.
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The stainless steel was previously characterized for roughness by using a profilometer (Tencor AS500 profilometer, KAL-Tencor, San Jose, CA) and for contact angle (hydrophobicity) with a goniometer (Ramé-Hart, model number 100-00, Ramé-Hart, Inc, Mountain Lakes, NJ) (21 ).
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The surface morphology modifications induced by shot peening were evaluated using an optical profilometer.
The characterization of the surface is carried out using an optical profilometer and two different species of fibers, as well as their mixture, are used.
The roughness and topography was investigated by light scattering spectroscopy using an optical profilometer (Contour GT-K1, Veeco).
The profile of one of the longest released PS microbeams measured using an optical profilometer is shown in Figure 4.
The thickness of the PDMS membranes under different spin speeds, spin times, and PDMS concentrations was measured using an optical profilometer.
The plated area was then profiled using an optical profilometer (Wyco NT3300, Veeco Instruments Inc., Woodbury, NY) to find the difference in height between the PDMS film and the substrate.
After aeration the pre-formed gels were poured into Petri dishes and the aerated gel surface was observed using an optical profilometer GT Contour Surface Metrology (Veeco, Tucson, USA).
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