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Using a micromachined sensor, the researchers were able to measure the adhesive force of a single seta.
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This detector employs a micromachined sensor structure on silicon wafer that maintains a constant temperature throughout the device.
A third approach is to use a micromachined integrated structure containing an array of optical axes with uniform focusing fields across the array.
Schmidt et al. [ 44] used a micromachined aperture to reconstitute a BLM.
All the integrations done at Fleecer have been done using a Structure Sensor.
Displacement was monitored using an optical sensor with submicrometer sensitivity.
"In closed offices we will use a motion sensor, and in open spaces, a light sensor," he said.
The Thermapen has always used a thermocouple sensor.
Large arrays of sensor elements are achieved by using micromachined miniaturization of sensor arrays.
This paper outlines the design concept and preliminary results for a multifunctional micromachined sensor unit, comprising CMOS-compatible temperature, humidity and gas sensors on a single silicon substrate.
We present a novel micromachined sensor for the viscosity of liquids.
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