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Highly sensitive hydrogen gas sensors were fabricated using a microelectromechanical system (MEMS) and anodic aluminum oxides (AAOs) process.
Verbeck made a reflectron-based mini-TOF using a microelectromechanical system, or MEMS, technology, fashioning components out of boron-doped silicon wafers that he then assembled like old-fashioned tab-and-slot paper models.
Tensile tests were performed on carbon nanofibers in situ a transmission electron microscope (TEM) using a microelectromechanical system (MEMS) tensile testing device.
A highly sensitive hydrogen gas sensor of the multi-layer, micro heater type was designed and fabricated using a microelectromechanical system (MEMS) process.
This study investigated the combined effects of thickness (30 vs 100 nm) and average grain size (40 vs 70 nm for the thicker films) on the crack propagation mechanisms in ultrathin nanocrystalline gold microbeams, using a microelectromechanical system device to perform in situ transmission electron microscope (TEM) tensile experiments.
CardioMEMS, the assessed pulmonary heart sensor, enables the permanent surveillance of patients with chronic heart failure (New York Heart Association III), based on telemonitoring, using a microelectromechanical system.
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The in situ heating was performed inside an aberration-corrected STEM using a microelectromechanical systems (MEMS -based heating holder (Aduro MEMS -basedProtocheatingee Experimental Section for details).
Finally, in a study using a microelectromechanical monitoring system, 36 the investigators observed an adherence rate of 91.5% and 86% in respect of administration timetables for protease inhibitors only.
Pyroelectric infrared detector array using lead zirconate titanate (PbZr0.3Ti0.7O3, PZT) thin film as a sensing layer was fabricated on Si3N4/SiO2/Si substrate by a microelectromechanical system (MEMS) technique.
In addition, a MicroElectroMechanical System (MEMS) device is presented.
The second sample was a microelectromechanical system (MEMS) device (Protochips Aduro [23]).
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