Sentence examples for ultra shallow from inspiring English sources

He, Si and B implantation are successively combined in order to produce ultra shallow junctions (USJs).

The efficiency of plasma immersion ion implantation (PIII) is no more to prove for the realization of ultra shallow junctions (USJ) in semiconductor applications.

A comprehensive study has been undertaken by the authors to conduct advanced analysis and enable design tools for innovative Ultra Shallow Floor Beams (USFBs) in buildings.

In this paper, we will also show cluster ion, such as GeB and SiB, implantation in silicon, and two-stage annealing in forming ultra shallow junction in Si.

An accurate method to measure the four point probe (4PP) sheet resistance (RS) of ultra shallow junction (USJ) Source Drain Extension structures is described.

First, metallic contamination, homogeneity, reproducibility, and SIMS profiles of ultra shallow junctions made by PULSION® BF3 implantation on 200-mm silicon wafers are presented.

Therefore, a tunnel with ultra-shallow depth undergoes asymmetric rock pressure.

Open image in new window Fig. 1 Mechanical model of ultra-shallow tunnel.

Countermeasures for the successful activation of ultra-shallow n+ junctions in Ge will be discussed next.

Cluster ion implantation has been applied to realize ultra-shallow junction formation.

These results improve the engineering of F-enriched Si, for the realization of ultra-shallow junctions.