The transferred pattern will be significantly damaged by a strong adhesion under smaller feature size.
The effect of aperture size on the transferred pattern has previously been demonstrated for metallic nanowire fabrication [31].
The square has a lateral size of 950 nm × 950 nm slightly below 1 μm × 1 μm, indicating a small shrinkage of the transferred pattern, which could be due to fluctuations during one of the pattering steps.
These techniques above have partially the same process: they can transfer patterns onto the surface of a substrate.
The newly developed patterns functioned well as masks for transferring patterns on Si substrates by reactive ion etching.
Involved nanomold imprinting to transfer patterns on a substrate, sacrificial layers deposition for bulk silicon substrate etching and polymer replication processes, which cause the nanostructure manufacturing process being difficult, time-consuming, and expensive.
Regardless, the majority of students from both groups was able to successfully complete the modeling and guided inquiry assignments, the outcomes of which indicated that they perceived and were able to transfer patterns of similarity and differences.
Current transfer techniques are either limited by the type and shape of the target substrate, or their inability to transfer patterned and thin VACNT arrays.
We report detailed methods to transfer patterned metal films from a silicon wafer to PDMS and show examples of mechanically tunable plasmonic resonances using periodic gold nanohole arrays and pyramidal tips.
