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We demonstrate an effective design for fabrication of short channel organic transistors (<3 μm channel length) on ultrathin 1 μm thick substrates that exhibit excellent thermal stability.
These 15 micron thick substrates exhibited roughness values between 1 and 2 nm root-mean-square (RMS) and 9 nm RMS over 25 μm2 and 100 μm2 analysis areas, respectively.
Laser micromachining is a new technology with particular advantages for detector fabrication, including the ability to produce novel structures, machine wells in thick substrates, and produce detector arrays well suited to inclusion in modern microelectronics components.
The proposed approach, which consists in a deep grooved hole array composed by holes of two alternating doping type, allows both a reduction of the cell series resistance and an increase in collection efficiency also by using relatively thick substrates with low lifetime.
Figure 3 Mode areas on thin and thick substrates at various gap widths d.
The confinement factors, modal losses, and corresponding transparency thresholds of the guided modes on thin and thick substrates were explored for various wire radii.
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For thinned Si-cap integration, silicon wafers with the thickness of 525 μm are thinned to 300-μm thick substrate in the beginning.
Flexible QLEDs have been commonly manufactured based on ITO electrodes patterned on a flexible PET substrate, whose thickness was in the range of hundreds of micrometers.148 Owing to the thick substrate and the fragile ITO electrode, the minimum bending radius of the display was limited to several tens of millimeters.
Once sculpted, the devices remain tethered to the thick substrate.
Analyses of thin films on thick substrate are often highly influenced by the substrate properties.
Various configurations including thick substrate and membrane-like approaches are tested.
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