Exact(17)
The contact zone is assumed to be important for the removal function, as it is believed to be the location for the aggregation of bubbles and flocs.
According to the obtained distribution of the removal function, the latter can be used to optimize the etching time matrix by minimizing the root-mean-square error between the simulation results and the design value.
The removal function is nonnegative.
The coefficient term of Equation 5 is proportional to the removal function, and it does not impact the shape of the removal function curve.
In order to obtain high polishing quality, the removal function of designed polishing path with isotropy property is expected to apply into freeform surface polishing task.
The overall randomness characteristic of the fractal curve polishing path can be seen from the three-dimensional graph of the removal function which is shown in Figure 18.
Similar(43)
Therefore, the removal functions of them have strong anisotropy property.
By comparing the removal functions of different polishing path, the reasonable polishing path and parameters are chosen.
With the assumption of a constant polishing pressure, the removal functions of scan line polishing path, Archimedean spiral polishing path, and Hilbert fractal polishing path are derived.
When the polishing tool is stationary and rotates with angular velocity ω t, the polishing removal function of the point with radius r to the center of polishing tool is described as: z ( r, t ) = k · n s 2 π · R 2 · r · ω t · t (4) Figure 1 Polishing model of a fixed point.
In addition, the periodic of the polishing removal function is not obvious, which means it satisfies the overall randomness requirement of polishing.
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