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In order to estimate the capabilities of matrix plasmas for PACVD processing in terms of deposition rate and uniformity, SiOCH and SiNCH films were deposited using TMS (tetramethylsilane), as the organic gas precursor of silicon, mixed with oxygen or nitrogen flows.
Higher the dilution, higher is the effect of DC potential in terms of deposition rate and quantity. .
Higher the dilution, higher is the effect of DC potential in terms of deposition rate and quantity.
The effectiveness of a carotenoid source in terms of deposition and pigmentation is species-specific (Ha et al. 1993).
In addition the filter itself needs to be well defined in terms of deposition rate and endurance.
The optimal conditions in terms of deposition rate and uniformity in coating thickness, structure and anisotropy were first investigated.
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In terms of 200 °C deposition temperature, the deposited film exhibits an In O ratio of 1 1.36 without detectable carbon, thus revealing the existence of oxygen vacancies in the as-deposited film.
These effects are explained in terms of the deposition mechanisms involved and are related to variation in deposition species and geometrical field enhancements within the deposition chamber.
In terms of the deposition temperature of 160 °C, the deposited In2O3 film is amorphous, and it exhibits a very smooth surface.
Runoff upslope from the depositional base level established by the long-term locus of deposition cannot erode below the resulting deposit.
If the amount of unbalanced sodium is expressed in terms of halite deposition, it would correspond to 1.6 × 1014 grams of sodium chloride per year as compared with a potential total depositional rate of 3.3 × 1014 grams annually.
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