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The system reads data from two types of sensors, temperature (resistive) and pressure (capacitive).
We have developed new thin film multipurpose microsensors (IDAT) consisting of an impedance sensor based on the interdigital array of microelectrodes which is integrated together with temperature resistive sensor on single chip.
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(a) Current voltage (I-V) curve of the Pt/SiO2/TiN sandwich device at room temperature without resistive switching characteristic.
In this letter, we fabricated a bilayer flexible RRAM device based on HfO2/Al2O3 films under low temperature, with resistive layers deposited using a low-temperature ALD process at 120°C and the electrodes sputtered by direct current (DC) magnetron reactive sputtering at room temperature.
One can induce high temperatures in resistive contacts through the electron scattering that occurs with current flow.
We demonstrate that the thermodiode is considerably more reliable in long-term direct current operation at high temperatures when compared to the more classical resistive temperature detectors (RTDs) using CMOS metallization layers (tungsten or aluminum).
Figure 4f shows an illustration and optical image (inset) of a semitransparent piezoelectric strain sensor and resistive temperature sensor for measuring wrist motions and body-temperature changes for wheelchair control and hypothermia diagnosis, respectively.
The monolithic integration of an on-chip resistive temperature detector (RTD) with the proposed humidity sensor is thus implemented for the temperature compensated readout.
These heated reference samples can include a localized resistive temperature sensors (RTD) or standalone platinum membranes (typically 10 × 10 μm2) on which the temperature can be measured precisely.
Fang, Z. et al. Temperature instability of resistive switching on HfOx-based RRAM devices.
Flexible arrays of resistive temperature and strain sensors have been designed, and fabricated on polyimide sheets.
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