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Raman spectroscopy is a commonly used technique for the structural characterization of homogeneous SiGe[11 14], and in this work, we demonstrate how it is possible to extend its capabilities to the extraction of compositional profiles, with the advantage over the aforementioned techniques of being simultaneously fast and nondestructive.
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Justyna Jupowicz-Kozak
CEO of Professional Science Editing for Scientists @ prosciediting.com