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The system was evacuated by a mechanical vacuum pump.
Prior to sputtering, the chamber of the sputtering system was evacuated to a pressure of approximately 5 × 10-7 Torr.
After the system was evacuated to a pressure of less than 100 mTorr using a mechanical pump, high-purity argon gas was introduced into the system at a flow rate of 10 sccm.
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As the system is evacuated, atmospheric pressure pushes the liquid steel through the snorkels and up into the vessel.
The difference in levels of mercury between this trapped volume and the system being evacuated corresponds directly to the pressure in torr in the trapped volume.
After the whole system is evacuated by a vacuum pump for 20 min, the argon gas is guided into the system at 250 sccm and the pressure is kept at 350 Torr.
The whole system is evacuated by a vacuum pump for 20 min, then the argon gas is guided into the system at 200 sccm, and the pressure is kept at 300 Torr.
Because of a water-line break in the fire-sprinkler system, FedExForum was evacuated late in the third period and the game was delayed 36 minutes.
An RF sputtering system includes: a sputtering chamber that was evacuated to less than 9.4 × 10−6 torr prior to sputter and then backfilled with argon gas and sputtering source (target) that was 3 in.
The stub was loaded into the XPS system through a load-lock, which was evacuated before transfer to the analysis chamber.
After the condensation was complete, the process chamber was evacuated again, and the whole system returned to room temperature.
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