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This paper presents a study on bulk structuring of polyimide by reactive ion etching (RIE).
The results obtained prove that conventional RIE equipment can successfully be employed to conduct bulk structuring of polyimide.
The need for deep structuring of polyimide is exemplified by the design of a MEMS thermal flow sensor.
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In the multi-layered structures of polyimide LB films, the efficiencies of photoinduced electron transfer from porphyrin moieties to pyromellitimide fragments varied sharply with the number of spacing layers, indicating that the short-range interactions such as electron transfer could be controlled by the fabric of ultrathin films.
Figure 1 shows the chemical structure of the polyimide AL-00010.
Figure 1 The chemical structure of the polyimide AL-00010 used as the LC alignment layer.
Photoinduced electron transfer between porphyrin moieties and pyromellitimide fragments has been investigated in multi-layered structures of ultrathin polyimide films prepared by the Langmuir Blodgett (LB) technique.
The role of the supramolecular structure of ordered regions of polyimide films in the development of graphite structure under graphitization process has been discussed.
In this work the ion-induced changes of chemical structures of three polyimides were analyzed by attenuated total reflection.
In summary, interactions between the precursors and solvent (NMP) lead to large differences in higher order structures of the polyimides, which in turn affects the TECs.
The liquid flame spray route and the encapsulated structure of the polyimide-Cu coatings would open a new window for designing and constructing environment-friendly marine antifouling layers for long-term applications.
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