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The proposed pMOSFET is composed of STI, a source/drain lattice mismatched silicon-germanium alloy, and a compressed contact etch stop liner (CESL) stressor.
It is observed that mechanical stresses induced by tensile and compressive Etch Stop Liner (t-ESL and c-ESL), embedded SiGe (eSiGe) and Shallow Trench Isolation (STI) are not uniform in all the fingers sharing an active region.
In particular, we will focus on the study of middle-of-line (MOL) process parameters, (i.e. MOL thermal expense and mechanical stress from contact etch stop liner) on transistor performance and reliability.
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