The phrase "slight deformation" is correct and usable in written English.
It is generally used to describe a minor change in an object's form or structure. For example, "The wind caused a slight deformation to the structure of the building."
The rotation stage induced a slight deformation visible here.
The Au only had a slight deformation after bonding using a force of 450 µN.
Initially, only a slight deformation developed in the heated RCB, but it gradually increased as the applied force increased.
The drain current response to slight deformation induced by touching an object clearly increased with increasing internal strain.
A slight deformation of the austenite matrix was found to triple the number of ferrite nuclei during isothermal annealing.
Tensile cracks evolved on the crest and the upper part of slope in loess layer, moreover, failures occurred at slope surface, and only slight deformation at slope toe.
It also is involved in bone remodeling by transmitting signals to other osteocytes in response to even slight deformations of bone caused by muscular activity.
Slight deformations in the volcano's surface, as measured by Global Positioning System devices, suggest that gases are continuing to build up below as they bubble out of the magma, causing the surface to bulge.
The metal-coated nb-Si show only slight deformations and volume changes, resulting from the amorphization during continuous cycling.
Moreover, the 1,2-cyclopentane units, as well as comonomers bulkier than propylene, cause only slight deformations of polyethylene orthorhombic unit cell parameters.
This was attributed to slight deformations in the framework caused by intermolecular repulsions from the confined methane (Wu et al., 2009 ▶).
