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From the ion sheath evolution, it is also found that the sheath structure changes with time.
The fast sheath evolution brings a shortage of ions arriving at the deeper section of the trench.
The distributions of film thickness and implanted dose are studied, considering the current distribution inside the trench and the ion sheath evolution.
The ion sheath evolution inside the trench with a width of 30 mm and a depth of 20 mm is experimentally observed.
From an ion sheath evolution observed experimentally, the plasma density is estimated to be about 1010 cm−3 using Lieberman's theory.
In plasma source ion implantation (PSII), the temporal and spatial sheath evolution in terms of the applied negative pulse on a planar target was investigated using a Langmuir probe.
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The production of a high-density plasma is desirable in order for efficient material processing by PBII, and for reducing the ion-sheath evolution time.
For conformal ion implantation into three-dimensional materials by plasma-based ion implantation (PBII), the production of a uniform, large-volume plasma is required and the ion-sheath evolution must be controlled.
Here, we use a fluid model to investigate the time evolution of a sheath expanding into the plasma.
We choose (sigma_{text{s}} = 4 times 10^{ - 19} {text{m}}^{2}) as the ion-neutral collision cross section and alter the gas pressure P g = k B T g n g and for the both values of collision power parameter β = 0 and −1 to examine their effect on time evolution of the sheath dynamic structure.
The Evolution™ mechanical dilator sheath (Cook Vascular Inc., Vandergrift, PA, USA) is a rotationally powered telescoping device with an inner sheath that has a stainless steel bladed distal tip.
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