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Sheath capacitance has also been studied in terms of its capacitively coupled plasma (e.g., Chen, 2006).
Fig. 6 Measured sheath capacitance in the S-310-35 experiment and calculated sheath capacitance.
It is seen that sheath capacitance increases by increasing power.
The sheath capacitance was analytically calculated from the Debye length.
Figure7 indicates the sheath capacitance curve versus RF power.
This indicates that the calculation methodology of the sheath capacitance described in Section 2 is valid; and the Debye length can be estimated from the observed sheath capacitance.
Fig. 4 Measured sheath capacitance in the ascent of the S-520-23 sounding rocket and the sheath capacitance calculated from the Debye length.
Fig. 5 Sheath capacitance observed during the descent of the S-520-23 sounding rocket.
The dashed line denotes the sheath capacitance calculated from the observed Debye length.
Here, we should emphasize the practicality of the plasma diagnosis from the sheath capacitance.
The solid line represents calculation including the sheath capacitance of Cs = 30 pF.
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