Sentence examples for sensor variables from inspiring English sources

Plasma etching processes have a potentially large number of sensor variables to be utilized, and the number of the sensor variables is growing due to advances in real-time sensors.

In addition, the sensor variables from plasma sensors require additional knowledge about plasmas, which becomes a big burden for engineers to utilize them in this filed.

For example, Yang evaluates occupancy modeling using twelve ambient sensor variables with results which demonstrate that 20% of gas and 18% of electricity could be saved effectively if occupancy-based demand-response HVAC control is implemented in IB [42].

Weighted by the Vp (variable importance in projection) index, which indicates the importance of the sensor variables to the quality variables, the new monitoring statistic, Qv, is developed to ensure that the most vital sensor faults be detected successfully.

Thus an effective procedure for sensor variable selection with minimum plasma knowledge is needed to develop in plasma etching.

The procedure for sensor variable selection introduced in this paper can be a starting point for various sensor-related applications in semiconductor manufacturing.

The integrated squared response (ISR) based sensor variable selection method which facilitates collecting and analyzing sensor data at one time with regard to manipulated variables (MVs) is suggested in this paper.

The ISR based sensor variable selection method is incorporated with relative gain array (RGA) or non-square relative gain array (NRGA) for effective variable selection in building a virtual metrology (VM) system to predict critical dimension (CD) in plasma etching.

Innovations that marry the digital and energy disciplines are widespread, including technology that controls the energy consumption of buildings and interoperable communicating devices - such as temperature and air quality sensors, variable speed drives and robots, as well as smart meters and intensity and colour controlled LED lighting.

Engineered metal foams have strong potential in applications such as fuel cell electrodes, sensors, variable springs, filtering media, and compositionally graded composite structures.

Our computational and experimental results show that the suggested device has clear functional advantages and can be efficiently used in applications including switches, threshold inertial sensors, variable optical attenuators as well as in micro-and nanomechanical logical elements.