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While scanning stage errors can be estimated for suitably-designed sensor systems, it is usually not possible to simultaneously estimate both scanning stage and systematic sensor errors.
No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motions.
Additional angular scanning stage measurements can solve this problem, and potentials and limitations of such a proceeding will be assessed.
Scanning topography measurements using systems of coupled distance sensors suffer from the presence of scanning stage and systematic sensor errors.
High-speed imaging with a fast x-y scanning stage combined with a custom build AFM controller shows the potential of the cantilever.
In this study we have developed a scanning stage mechanism based on quasi-monolithic integration of x y piezoelectric actuation system together with a silicon MEMS unit.
The laser was then focused through the micro-lens array in the optical module to form a point array and was projected onto a dynamic scanning stage.
In a long range (about several tens of micrometers), measurement uncertainty is dominantly affected by the Abbe error of the XY scanning stage.
Moreover, the XY scanning stage is designed to minimize the rotation angle, as Abbe errors occur through multiple combination of the offset and the rotation angle.
Fluorescence imaging of biochip arrays is accomplished with a custom designed piezo-motor-driven scanning stage coupled to an optical element based on supercritical angle fluorescence (SAF).
A novel scanning stage, having a permanent magnet based device that actively provides assist forces to the motor to simultaneously reduce motor heating and residual vibration, is presented.
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