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Figure 2 (0002) ω -2 θ scan of samples A and B. IL stands for interlayer.

SERS matrix scans of samples over finite areas were carried out at the central frequency f = 1576 cm−1 to assess reparability, reliability, and sensitiveness of the measurements (Fig. 4b).

The scanning of samples was performed in trace and retrace to avoid the scan artifacts.

The scans of samples of flat, normal, and hollow feet are shown in Figs.  1, 2, and 3.

Fig. 8 AFM images and line scans of sample surfaces at different growth temperatures.

Fig. 3 AFM images in amplitudes and line scans of sample surfaces.

Figure 2 shows Ф scans of sample 2 for the Pb(111) diffraction with 2θ ≈ 31.3° and the Si(111) diffraction with 2θ ≈ 28.5°, respectively.

θ-2θ scan, ω-scan and Φ-scan of sample 1 showed in Fig. 1a c, which exhibited a very sharp out-of-plane and in-plane texture with FWHM values were 1.7° and 4.4°, respectively.

The scanning of sample surface was performed by electron beam with energy of 15 and 20 kV and a diameter of 5 nm in the secondary electron image regime.

AFM images in the area 2 μm × 2 μm and 2 μm line scans of sample surface with In droplets and InN nanodots grown at substrate temperature 350 °C are shown in Fig. 3a, b, respectively.

Data acquisition was the actual scanning of sample images with the Cyclone® Plus Storage Phosphor System to create an image file that can be analyzed by the OptiQuant™ Image Analysis Software.