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Mass resolution (M/ΔM) varied depending on sample roughness and all ToF-SIMS data were binned to 1 Da before calculating peak ratios or applying statistical analysis.
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It is known that the accuracy of the mercury injection experiment particularly for tight samples, is dependent on the degree of sample roughness (or external irregularity) and must be removed from the capillary pressure curve before an estimate of permeability is attempted.
It should be mentioned, though, that depth of focus is of minor significance for ToF-SIMS measurements, as height differences and high sample roughness lead to unwanted shading or geometry related artifacts and have to be avoided anyway [21,22].
Annealing at 200 °C and higher temperatures results in significant increase of the sample roughness as well (e.g., from 5 to 22 nm for the reference sample and sample annealed at 400 °C, respectively (Fig. 4)).
The proposed adaptive-optics-assisted (AO-assisted) system is in good agreement with the stylus method, and less than 8.42% error values are obtained for average sample roughness in the range of 0.05 0.58 μm.
The analysed sample must fit with Scanning Probe Microscopy requirements (solid sample, roughness in the micronscale range).
Figure 2 The 1 × 1 μm 2 AFM image of the Al sample showing the sample roughness is about 4.9 nm.
Apart from surface quality inspection, the AFM images of the outer APA surface have also been used for quantitative determination of the sample roughness by means of the root mean square (RMS) of the distribution of sample features height.
It is also important to note that all of the data presented here were processed using nominal mass binning due to sample roughness.
Average roughness (Ra)—the arithmetic average of a deviationy, from the center line is: Root-mean-square roughness (Rrms) is the root-mean-square deviation from center line: For each sample, the rms roughness and average roughness as defined in [21] were evaluated.
Physical characterization of the samples consisted of roughness and composition measurements.
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