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A compact (cracks and striations free) coverage which minimizes the roughness sample surface at short and large scales has been obtained by applying successive SiO2 layers with various thicknesses.
Fig. 1 Surface morphology and roughness (sample D) after coating with various thickness of photoresist (figures in parentheses indicate surface roughness).
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The inclined angle may be the angle between the probe and the scanning table or due to the inclined plane and the roughness of sample surface.
It is slightly better than the RMS roughness of sample B, which is 1.16 nm for an area of 10 × 10 μm2.
To quantify the potential changes in the void space and contact zones following a reactive percolation, the roughness at sample scale is depicted by topographic maps of the two fracture walls and by a thickness/height map of the voids.
After first IBP process, the roughness for sample D and A was reduced from 6.56 nm and 6.49 nm to 2.79 nm and 1.92 nm, respectively, 30% ~ 40% reduction rate.
It is measured (µm) using Veeco Optical Profiler model NT 9080. Figure 2 shows a captured image of surface roughness of sample at parameter 20 µs, 15 µm, 1 A, 50 mm/s of Ton, Toff, IP, and Wf, respectively.
The surface roughness of samples DH25 and DH50 with film thicknesses within the critical value after growth is significantly lower than that of sample DH200.
The 3-D surface roughness of samples was studied by AFM on square areas of topography on the 80 × 80 μm2 scanning area.
Surface roughness of samples treated under different processing modes and concentration of electrolyte components is increased due to the insufficient rate of anode dissolution.
In this research skin friction coefficient between cement paste – cement paste was measured, studying change in friction depending on the initial roughness of samples.
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