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For different frequencies from 5 to 350 kHz and reverse times from 1.1 to 5 μs, these films were deposited on polished substrates of stainless steel, aluminium pin stubs and float glass.
Time-averaged ion energy distributions (IEDs) and time-resolved floating potentials were measured for a range of reverse times at electrodes immersed in a 60 kHz pulsed magnetron discharge, and compared to the DC condition.
In addition, the extent of synchronization of the voltage waveforms of the two magnetrons also substantially influenced both the IEDs and the ion fluxes, while varying the pulsing frequencies and reverse times (duty cycle) in either synchronized or asynchronized modes also resulted in different ion energies and ion fluxes within the plasma.
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