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To obtain information on the profile of light elements (O, N) and detect the presence of hydrogen on the films, heavy ion elastic recoil detection analysis was performed.
The film composition was measured by elastic recoil detection analysis.
Film characterization was accomplished by combining hydrogen elastic recoil detection, Raman spectroscopy, and instrumented nanoindentation.
Elastic recoil detection analysis indicated a surface nitrogen concentration of 35 40 at.%.
Elastic recoil detection analysis (ERDA) was used in order to determine the composition of the samples.
Subsequently, the films were investigated using elastic recoil detection analysis (ERDA) and X-ray diffraction (XRD).
Process optimization is monitored by Fourier Transform InfraRed and Elastic Recoil Detection analyses.
Elastic recoil detection analysis was applied for determination of hydrogen concentration profiles in irradiated samples.
Korschinek, G. et al. A new value for the half-life of Be-10 by Heavy-Ion Elastic Recoil Detection and liquid scintillation counting.
The Cu and He concentration depth profiles were determined by Rutherford backscattering and elastic recoil detection analysis, respectively.
The chemical composition of BCN films was determined by Rutherford backscattering spectroscopy (RBS) and elastic recoil detection analysis (ERDA).
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