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The epitaxial layers were design for an enhancement-mode pHEMT after gate recess process.
These remarkable characteristics stem from the compact geometry design of the In0.52Al0.48As/In0.7Ga0.3As PHEMTs with LGS = LGD = 0.4 μm, coupled with an optimized gate recess process that yields tight control of side-recess spacing (Lside).
Comparing to previous E/D-mode pHEMT technology, this E-mode pHEMTs and MIMS-gate D-mode pHEMTs exhibit a highly potential for high uniformity GaAs logic circuit applications due to its single recess process.
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