It is found that purge time significantly influences water content of the membrane after purge and subsequently cold-start performance.
Cold-start performance following gas purge and cool down strongly depends on the purge time and startup temperature.
Precursors are pulsed sequentially in an inert carrier gas through a heated batch of substrates, with a purge time between the pulses to prevent vapor phase reactions.
With increasing purge time, homogeneity and conformality of the film improved and the variation of thickness from perimeter to inside the bundle decreased significantly.
The optimal conditions for the analytical system include a 12 min purge time at a temperature of 60 °C, and 4 min of desorption time with a desorption temperature of 260 °C.
Most of the parameters that affect the extraction step such as temperature, pressure, static extraction time, number of cycles, purge time and flush volume were optimized using a fractional experimental design.
Parameters implied in the extraction process; such us temperature, static time, number of extraction cycles, purge time and flush volume; have been optimised using a formal methodology based on statistical experimental design in order to obtain the best results.
Because of the very high cost of UHP gases and factory downtime, it is critical for high-volume semiconductor manufacturers to reduce purge gas usage as well as purge time during the dry-down process.
The results show that under certain conditions the new PCP process has significant advantages over the SSP process; for example, it reduces the purge time and gas usage when the gas purity at POU is the principal concern.
At 30 s purge time, the films were already smooth and conformal, as expected for a deposition controlled by surface saturation, and the deposition rate was 0.34 nm/cycle.
Once a distribution system is contaminated, a significant amount of purge time is required to recover the system background due to the strong interactions between moisture molecules and the inner surfaces of the components in a gas distribution system.
