Nanofabrications of silicon by mechanical and electrical processing were performed.
All image processing were performed by FMRIB's Software Library (http://www.fmrib.ox.uk/fsl, Oxford, UK) toolkits.
The data acquisition and processing were performed by Analyst version 1.4.2 software (MDS Sciex, Toronto, Canada).
The mechanical and electrical processing were performed under nine sets of conditions.
Data acquisition and processing were performed using the Analyst QS 1.1 software (AB SCIEX, Darmstadt, Germany).
Data acquisition and data processing were performed on Hewlett Packard ChemStation software system.
Image pre-processing and processing were performed using ERDAS IMAGINE 9.2 (ERDAS IMAGINE, Leica Geosystems Geospatial Imagine, LLC).
Data acquisition and processing were performed as described previously [69].
Calibration and image processing were performed as described previously [73].
Chip hybridization and data acquisition and processing were performed as described [19].
The analysis and data processing were performed by the Biolog® team (Hayward, CA).
