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For example, differences in Ca/P ratios between the initial calcium orthophosphates and that in the sputtered coatings were suggested to be attributed to the preferential sputtering of calcium, probably due to a possibility of orthophosphate ions being pumped away before they are deposited at the substrate (Zalm 1989).
In contrast, no ripples were observed during the preferential sputtering of GaAs.
Thus, the preferential sputtering of As causes the Ga enrichment at the surface of GaAs after irradiation.
Compared to the target composition, preferential sputtering of the carbon component was observed.
Preferential sputtering of light dopants results in a reduction in the threshold energy for sputtering.
Although the high-energy ion beam also sputters off Ga atoms from the GaAs substrate, the preferential sputtering of As atoms leaves a Ga-rich surface.
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The edges of the grains become smoother for the preferential sputtering to the sharp edge of the grains during plasma sputtering.
It is based on balance equations which include processes of preferential sputtering, surface atoms displacements, creation of defects by irradiation and thermal diffusion.
Despite neglecting effects of spherical particle geometry, small QD size, and preferential sputtering, the outmost surface of the QDs presented atomic concentrations of Zn, Cd, and S of 50 ± 4%, 16 ± 2%, and 33±3%3%, respectively.
However, the role of size evolution of nano-dots in the context of preferential sputtering and diffusion-induced agglomeration has not been studied.
The fabrication of nano-dots on compound semiconductor surfaces induced by ion irradiation is of particular interest due to the higher possibility of production of well-organized nano-dots under the effect of preferential sputtering [14].
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