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A high precision positioning system can be achieved with it.
Moreover, precision positioning of thermal load/device is also maintained.
In microelectronics manufacturing, the macro-micro precision positioning system is often utilized to achieve a high-precision positioning motion with high-velocity and large-stroke.
Piezo-actuated flexure-based precision positioning platforms have been widely used in micro/nano manipulation.
However, pneumatic actuators have notable nonlinear characteristics, which make precision positioning difficult to achieve.
Some advanced applications of measurement technologies for precision positioning in manufacturing industries are also demonstrated.
Similar(16)
Correct ambiguity resolution (AR) is the key for high-precision positioning.
The experimental results show that the proposed controller can significantly achieve the high-precision positioning.
This paper presents a novel linear piezoelectric motor which is suitable for rapid ultra-precision positioning.
A nominal characteristic trajectory following controller (NCTF controller) is used for the ultra-precision positioning.
Piezoelectric multilayer ceramics are increasingly used in sophisticated applications for high-precision positioning systems.
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