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Thus, a thicker metal barrier is deposited to overcome poor step coverage but increases the production cost.
This approach has the benefits of low temperature during process but suffers poor step coverage easily for high aspect ratio TSV (>10 1) [12].
However, it inevitably causes sidewall scalloping roughness which may induce poor step coverage of following processes, resulting in electrical leakage and reliability issues.
However, it can be easily anticipated that the fabrication of this confined structure is not possible using the conventional sputtering process for the GST film deposition due to its inherent poor step coverage.
In contrast to the ALD film, the iridium film after sputter deposition shows poor step coverage with most of the iridium being located on top of the ridges, typical for a line-of-sight deposition.
These analyses results revealed the root causes as the formation of a TixAly layer, porous and small void areas around the failed via bottom due to poor step coverage of the TiN/Ti barrier layer and the growth of the voids by tensile residual-stress in Al line.
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So Ryan — the man whose budget would wreak havoc on the poor — steps to a podium and pretends to be a defender of the poor.
Poor stepping up from Myers though @Busfield December 7, 2013 Paolo Bandini (@Paolo_Bandini) Whole #SKC team called together for a huddle during this injury break.
Today is election day in Moldova, Europe's poor step-sister in the southeast corner, near the Black Sea.
In contrast, the training in the unirradiated group resulted in no apparent beneficial effects, and yielded an inverse correlation between standing and stepping performance, e.g., subject with good standing showed poor stepping capacity.
Our results clearly showed that older adults tended to overestimate, or underestimate to a lesser extent, physical ability which was potentially diminished with age, and that older adults with poor step-over performance tended to overestimate their ability more than older adults with good step-over performance.
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