A series of polishing experiments on different materials and polishing parameters are conducted to validate its polishing performance compared with FJP.
The model accounts for the contributions from the constitutive characteristics and thermal properties of the materials and the key polishing parameters.
Compatibility of the slurries with the low-k stacks, dishing and erosion, impact of polishing parameters like down force and platen speed on low-k stack integrity were examined.
Furthermore, the wear coefficients were calculated through measuring the material removal depth, the surface morphologies were measured by a scanning electron microscopy in revealing the different material removal modes under various different polishing parameters.
Tsai et al. (2008) used Taguchi's design of experiments to identify the optimal abrasive jet polishing parameters when applied to the polishing of electrical-discharged-machined SKD 61 mold steel specimens.
Let C uv be polishing path in parameter u-v plane and t be the parameter of path C uv. Mapping the plane to the freeform surface obtains the project path C f.
Experimental results showed a reduction of surface roughness from 10.2 μm to 2.4 μm after laser polishing with optimised parameters.
After optimizing the experimental parameters for polishing, pickling and sandblasting in order to develop a hydrophobic surface, the surface morphology and the wetting properties of the modified surface were characterized using scanning electron microscopy (SEM), atomic force microscopy (AFM), confocal laser scanning microscopy (CLSM) and contact angle meter.
This indicates that under the conditions in which the model relation is satisfied, regardless of how the parameters are changed, all parameters can realize active polishing, and the mode is reliable.
The objective of this study was to determine the effect of different dental polishing methods on surface texture parameters of dental nanocomposites.
