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MEMS based Film Bulk Acoustic Resonator (FBAR) is widelyused as a sensor for biochemical, physical sensing or as a filter.
In the area of smart materials, SMMs and electrochemical materials, such as piezoelectrics, are currently considered for actuation, physical sensing, and energy harvesting in microscale.
The chapter then introduces fabrication techniques and sketches microfluidic components for flow control, pumping, physical sensing, and dispensing and their applications in (bio-) analytical chemistry, drug discovery, and chemical process engineering.
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"The connections to quakes make physical sense.
The argument makes no physical sense.
"I felt stronger -- and not just in a physical sense.
"It wasn't just big in the technical, physical sense.
Nothing in them endangered anyone in a physical sense.
Then I feel an exhilarating, physical sense of now.
And exertions they were, in a physical sense.
It not only has to make physical sense but mental sense.
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