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In this paper, we have tried to improve the endpoint detection in plasma etch process by employing in the first stage a new proposed algorithm named spectra peak section (SPS) and in the second stage we have combined wavelet analysis with modified multivariate charts (Hotelling and MEWMA).
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Spectrum data of characteristic peak sections corresponding to PS and SB was used to establish the regression models of these two solutes, respectively, and their concentrations were determined accurately despite their characteristic peak sections overlapping.
Even if their peak sections overlapped, the two regression models are both accurate and stable, without interfered by the Raman signal coming from the other solute.
Spectrum data of characteristic peak sections corresponding to PS and SB was selected respectively to establish PLSR model of the two kinds of solutes in mixture solution.
It could be found in SERS spectra of PS and SB solution, and mixture solution of them, such as the ones shown in Fig. 5a that characteristic peak sections of PS and SB overlapped.
To measure PS concentration in the 36 kinds of solution listed in Table 1, intensity of characteristic peak sections of PS in these spectra all acted as calibration data.
HW, HY, JA, GH were involved in collecting the samples in the dataset, processing the samples for the SELDI analysis, SELDI MS acquisition, data processing with CiphergenExpress and in verifying the quality of the peaks (section 2.3).
Particularly the non-CBM1 cellulases showed a dual expression profile, with a peak in the top section where the ants chew fresh leaves into pulp and a more pronounced peak in the bottom section (Table 1).
The weak intensity of these peaks (sections 1 and 5) is an indication that dehydration and decarboxylation reactions occurred during the process.
At the Er3+ concentration 1.81 × 1020ions/cm3 curve 3 in Fig. 8), the emission intensity reaches maximum with peak cross section σ em = 10.9 × 10−21cm2 in Fig. 9. Compared with the peak emission cross section 7.9 × 10−21cm2 of Er3+ in conventional silica, our result has a 27.5% increase [14].
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