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After deposition, a 20-nm-thick circular Au electrode with an area of 7.1×10−4 cm2was patterned through a metal mask to form sandwich structure by dc sputtering.
Finally, a 50-nm-thick layer of gold was deposited onto the semiconductor layer through vacuum thermal evaporation and patterned through a shadow mask forming the source and drain electrodes.
A SiN of 4.1 nm thickness was then deposited on the implanted silicon wafer using low-pressure chemical vapor deposition (LPCVD) at 785 °C after an annealing process was performed at 1050 °C for 10 min; subsequently, the Ni top electrode (TE) was deposited and patterned through a shadow mask that contains circular patterns with a 100-μm radii.
The mold was created using a photo-sensitive material (SU-8 2100, MicroChem, MA) patterned through a transparent photomask and positioned over a silicon wafer [ 18].
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