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The CNTs self-assemble from atomic units in a highly parallelised process, which when coupled with high resolution lithographic techniques to pattern the catalyst material, allows for near nano-scale engineering of the CNTs and CNFs.
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The experiments were conducted according to the following procedure: (1) deposition of AlOx/Fe catalyst on Si substrates by RF magnetron sputtering; (2) FIB patterning of metamaterial patterns on the catalyst, followed by (3) FIB secondary etching process, without breaking vacuum; (4) CVD growth of CNT on the prepared samples (Fig. 1).
XRD pattern of the catalyst is shown in Fig. 5.
The powder XRD pattern of the catalyst [BN] before and the after the reaction is shown in Fig 1a.
The XRD pattern of the catalyst after five consecutive CO oxidation reactions up to 300°C (Figure4 (b)) indicated the formation of NiO and PdO as well as the presence of pre-existing Pd(0) species.
Figure 1 shows the XRD patterns of the catalyst (Fe Co/CaCO3) used for the preparation of MWCNTs by CVD method and the resulting peaks indicate the presence of the following phases (1: CaCO3, 2: Fe2O3, 3: CoO).
An individual CNT was synthesized when the 40-nm-diameter aperture was used to pattern the iron catalyst, as shown in the SEM image in Figure 4e.
The XRD patterns of the catalyst before and after the reaction are similar to the earlier patterns which were observed.
Finally, the wide temperature window of Co3O4 ALD allows for patterning of the catalyst via standard electron-beam lithography, as the deposition temperature is low enough to prevent resist reflowing.
The XRD patterns of the Catalyst I, Catalyst II, and γ-alumina are shown in Fig. 4.
Open image in new window Fig. 4 XRD patterns of the Catalyst I, Catalyst II, and γ-alumina.
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