Sentence examples for overlay errors from inspiring English sources

Exact(1)

However, due to the higher flexibility and thermal expansion of elastomeric materials such as PDMS, registration to existing patterns can be challenging leading to overlay errors.

Similar(59)

In double patterning lithography, within-layer overlay error results in critical dimensions variability.

The structures are therefore "self-aligned" with each other with negligible overlay error.

Therefore, statistical design techniques should be applied to estimate and optimize the yield loss due to overlay error.

However, wafer bonding tools currently do not have the capability to achieve better than 100 nm overlay error (3 sigma).

Overlay error has been considered as a systematic source of variation; however, it is segueing into a random error for technology nodes smaller than 45-nm.

In this paper, we study the impacts of overlay error on functional and parametric yields of interconnects in 32- and 22-nm technologies.

This is not trivial because, unlike projection optical lithography where 4× reduction is used, imprint is a 1× process where the overlay error in the mold will be transferred to the resist without any error reduction.

However, for the imprint damascene process to become a practical manufacturing method, one-first needs to fabricate a 3D imprint mold (template) with acceptable overlay error between the two pattern levels.

The insulin injected groups were shifted by 0.3 min to reduce overlay of error bars.

Both testing methods yielded very similar stress strain graphs with almost identical elastic and plastic regions with overlaying standard error bars for both whale bone and aluminum foam specimens.

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