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In addition, the surface of the evaporated Ag/glass film usually had an RMS roughness above 5 nm [13], which is an order of magnitude greater than that for the optical monitored ion etching treated E-beam coating with IAD films.
Figure 6 Cross-sectional STEM mapping of TAS multilayer structures deposited by E-beam evaporation with IAD. Figure 7 EDS line scans of TiO 2 /Ag/SiO 2 multilayer structures deposited by E-beam evaporation with IAD. Figure 8 shows a representative atomic force microscopy (AFM) topographic image of a silver film fabricated by E-beam coating with IAD after optical monitored ion etching treatment.
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However our target is too bright in visual light to be observed with the optical monitor.
In addition to X-ray telescopes, XMM-Newton has also an optical monitor.
Furthermore, with optical monitoring, layering defects were first investigated experimentally.
The Aspect Camera Assembly (ACA) is capable of providing simultaneous optical monitoring of a target during an observation.
When that happens the utility of the optical monitor data becomes limited.
A built-in optical microscope, coaxial and confocal with the electron beam, allows optical monitoring of the sample during measurements.
There are situations when the ACA cannot track the optical monitor star.
The power spectrum of the ACA optical monitor data shows two spikes.
In-situ optical monitoring to within 0.1% error enables these levels of performance.
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