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(typically powers would not exceed 10 mW at the objective pupil).
We located the SH WFS at the microscope objective pupil plane to measure the WF of the excitation beam.
It is in this plane that the objective pupil is filled and results in a tight focus in the focal plane.
These were also employed to conjugate the objective pupil with the DM (L2-L4) and the with the GMs (L1-L3).
A large beam diameter at the objective pupil was needed to ensure the best performance of the objective (the smallest spot on the sample).
Taking into account this, the first correction was applied to the excitation beam to eliminate the aberrations introduced by the optical elements in the path that goes from the laser to the objective pupil (which we called "Coupling Aberrations").
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Before entering the interferometer, the beam is expanded to 11 mm (1/ e width) by the beam expander, so that the objective pupils are overfilled by a factor of 1.22 for the 20×/0.5 objective and 1.92 for the 63×/0.9 objective.
The diameter of the objective pupils imaged on CCD1 (12 mm for the 20×/0.5 objective and 7.62 mm for the 63×/0.9 objective) are smaller than the sensitive surface of CCD1 (12.28 mm × 12.28 mm).
More importantly, it can complement the concept of objective lens pupil filling to provide the theoretical ground for illumination design in order to suppress the forbidden pitch phenomenon.
For an objective of pupil diameter D t, illuminated with a Gaussian beam of diameter D b (measured at 1/ e), the truncation ratio t is defined as t = D b/D t.
Depending on the application, one may wish to favor axial resolution and overfill the objective's pupil (with A ≈ 0.5) or one may favor a more parsimonious use of photons (with A > 1) at the expense of a slightly lower resolution.
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