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After the incubation, the mixture was evaporated under nitrogen flux.
In the large nitrogen flux condition, the aluminum adatoms easily collide with nitrogen adatoms.
Thermogravimetric curves were acquired from room temperature to 900 °C under nitrogen flux (40 ml min−1).
The aluminum flux was kept constant at the pressure of 7.6 × 10−8 Torr and the nitrogen flux was changed.
To purify the reaction product, 1 mL of benzene was added to the dried sample and evaporated under nitrogen flux.
During the growth phase, we lowered the plasma power and the nitrogen flux to 150 W and 0.3 sccm, respectively.
Finally, the samples were rinsed with deionized water and dried at room temperature in a smooth nitrogen flux.
During nitridation, the plasma power was set to 580 W and the nitrogen flux, to 1.2 sccm.
Typically, the electrical resistance was decreased with increasing the nitrogen flux and growth time.
Developing dynamic nitrogen flux models and using them for a prognosis and assessment of nitrogen effects remains a challenge.
In order to vary the N/Al flux ratio, the aluminum flux was kept constant at 7.6 × 10−8 Torr and the nitrogen flux was changed.
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