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But this multilayer actuator had some problems.
The internal stress distribution in multilayer actuator was analysed by a numerical simulation.
In this work, we proposed a special designed multilayer actuator based on the periodically orthogonal poled (POP) PZT ceramics.
And by using float electrode, multilayer actuator was manufactured to decrease internal stress concentration of inter-digital electrode.
Only a few layers are required to construct this multimorph actuator, instead of tens or even hundreds of layers that a conventional stacked multilayer actuator requires in order to realize a large displacement, thus greatly reducing manufacturing costs.
In this paper, the deformation and stress concentrations around the electrode tip in two multilayer actuator designs, partially and fully cofired, are investigated by means of experimental measurement and numerical simulations.
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Distribution of electromechanical field near electrode tips is closely related to the reliability of ferroelectric multilayer actuators.
Experimental results show that the average grain size, dielectric, and piezoelectric properties of the PZT thick-film multilayer actuators are strongly dependent on processing conditions.
PZT (lead zirconate titanate) multilayer actuators were of interest due to their small volume, fast response, low power consumption and low driving voltage.
The reliability of smart structures and in particular of ferroelectric multilayer actuators (MLA) is essentially reduced by accumulation of damage and crack formation.
The multimorph actuator presented in this paper provides a valuable alternative for actuator applications beyond those available with the popular bimorph and longitudinal multilayer actuators, such as for the second-stage track following control in computer hard disk drives.
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