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An experimental demonstration is given of a data-based multi-input multi-output (MIMO) feed-forward control design applied to the motion systems of a wafer scanner.
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This test is simple and can be performed by means of either an electrogoniometer or more complex video motion systems, both of which have become increasingly available throughout the clinical environment.
Biological motion systems are of particular interest to engineers in robotics, prosthetics and micromechanics.
Feedforward control can significantly enhance the performance of motion systems through compensation of known disturbances.
Along with the fast development of ultra-precision motion systems, model and control of piezoelectric actuators draw significant research interest.
In motion systems, a large part of the disturbances appear to be reproducible.
Yaw rate is a crucial signal for the motion control systems of ground vehicles.
This paper derives a jerk-shaped profile to address the vibration reduction of underdamped flexible dynamics of motion system.
That was in the 1850s, when mathematicians and mathematical physicists were beginning to use n-dimensional Euclidean space to describe the motions of systems of particles in the then-new kinetic theory of gases.
The tracking errors of the motion system are compared with and without cogging force compensation.
Scalar control and feedback linearization control techniques of the motion system are presented.
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