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Several reports have demonstrated the results of size-dependent elastic modulus of nanowires.

In other words, the elastic modulus of nanowires from AFM bending experiment is very sensitive to boundary conditions [17].

Moreover, extraction of elastic modulus of nanowires using resonance method (based on in situ TEM) [1] may be incorrect due to photoelastic effect of nanowire.

This is consistent with our finding that elastic modulus of our nanowires is unaffected by their sizes and that Young's modulus of nanowires is close to that of bulk material.

This indicates that, for nanowires with their diameter in the range of ~80 to ~600 nm, the Young's modulus of nanowires is close to that of bulk silicon in the (111) direction.

Moreover, a recent study by Boland and coworkers [5, 16] provides that the finite size effect may not play a significant role on the mechanical properties (e.g., elastic modulus) of nanowires.

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Although MEMS device and/or in situ TEM enable the direct measurement of stress strain relationship of nanowires, during the tensile test by in situ TEM and or MEMS device, the light used in TEM or MEMS device (for imaging of extended nanowire) may induce the artifact in estimation of elastic modulus of nanowire.

In a recent study by Li and coworkers [25], the finite size effect due to surface effect (e.g., surface stress effect) has played a vital role on elastic modulus of nanowire (e.g., ZnO nanowire) with its diameter of ~30 nm (≪100 nm).

Young's modulus of the nanowires was then calculated using the deflection of nanowire and applied force by the AFM. Figure 4 shows the results of such calculations.

From Hertz theory described in Eq. 3, we have extracted the Young's modulus of silicon nanowires from the curves that show the relationship between force constant of nanowire and applied force (e.g., see Fig. 4). Figure 5 shows the Young's modulus of various nanowires with respect to their diameters.

Moreover, in order to understand the finite size effect of silicon nanowires on their elastic properties, we have measured the elastic modulus of silicon nanowires with various diameters in a range of ~80 to ~600 nm using AFM indentation.

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