SOI prototypes were characterized in a vacuum chamber demonstrating drive-mode quality factor of 67,000 and ultra-high sense-mode quality factor of 125,000.
This paper reports a new dual mass vibratory MEMS z-axis rate gyroscope architecture that prioritizes the sense-mode quality factor and provides improved ordering of the mechanical vibrational modes.
In contrast, the higher-mode quality factors are affected when the cantilever-surface gap is still comparatively large (Figure 5b) and the fundamental mode is influenced least.
We found the values from measuring the normal mode mechanical quality factors, Q's, in the frequency range of about 2000-10,000 Hz, of silica disks coated with titania-doped tantala coupled with calculating the elastic energy in shear and bulk stresses in the coating using a finite element model.
The parametric study is thoroughly performed, concentrating on the series effects of nonlocal parameter, viscoelastic damping structure, aspect ratio, visco-Pasternak (VP) medium, mode number and quality factor (Q).
Optimization of structural parameters yields a single mode cavity with quality factor of Q= 2.5×104, by using the three-dimensional finite-difference time-domain (FDTD) simulation and filter diagonalization approach.
Two key prerequisites of strong coupling are deduced by discussing the angular frequency, mode coupling factor and quality factor.
Their four side faces constituted a built-in whispering-gallery mode microresonator with a quality factor as high as 430.
In this paper, we present an extremely simple method to determine the volume of a nanocavity mode and investigate the effect of the slab thickness on the quality factor and mode volume of the PC slab nanocavities based upon projected local density of states for photons [30].
We present an extremely simple method to obtain the mode volume and investigate the effect of the slab thickness on the quality factor and mode volume of photonic crystal slab nanocavities.
