First, the silicon master is exposed to oxygen plasma and then coated with a self-assembled monolayer (SAM) of PFOTS (perfluorooctyltrichlorosilane) in a desiccator at low pressure and room temperature by physical vapor deposition for 30 min. Afterwards, the master is baked on a hotplate at 150 °C for 30 min to remove any physisorbed molecules.
With the set 1-min communication cycle, the master spends 4020 ms per hour sending the sync beacon, leaving 31,980 ms to acknowledge client data transmission.
Defining a new auxiliary vector t=[t1,t2,…,t N ] T, the subproblems are as follows: Φ x ( t ) : min x i ∑ i = 1 N a i x i subject to ∑ i = 1 k 1 x i + 1 ≤ t k k = 1, …, N, x i ≥ 0, ∀ i Φ y ( t ) : min y i ∑ i = 1 N b i y i subject to ∑ i = 1 k 1 y i + 1 ≤ ∑ i = 1 k ρ i − t k k = 1, …, N, y i ≥ 0, ∀ i. and the master problem is min t Φ x ( t ) + Φ y ( t ).
In the ℓ th iteration, the master program reads as min α, λ, μ α s.t.
The master dual problem is min λ g λ = ∑ ij ∈ ℋ × R g ij λ ij + λ T c subject to λ ≥ 0 (21).
In the first stage, the Si master is placed on the Al substrate under a pressure of 1.3 MPa, and the system is heated to 300°C in 20 min. In the second stage, the pressure applied on the master first increases to 4 MPa rapidly and then maintains for 40 min, which enables the pattern duplication from the Si master into the Al substrate.
The master mix was then heated at 70°C for 10 min prior to use.
After UV curing (~10 min), the PUA molds were peeled away from the masters.
